Detail Publikasi
Edisi: Vol 2, No 6 (2021)
ISSN: 2660-5317

Abstrak

The purpose of this theoretical study is to reduce the number of experiments and thereby reduce the development time for thin-layer (thin-film) and planar technologies by simulating the processes occurring at the micro and nanoscale under the influence of radiation.

Kata Kunci
thin-layer coatings thin-film coatings interaction of radiation with matter
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