Detail Publikasi
Edisi: Vol 2, No 6 (2021)
ISSN: 2660-5317
Abstrak
The purpose of this theoretical study is to reduce the number of experiments and thereby reduce the development time for thin-layer (thin-film) and planar technologies by simulating the processes occurring at the micro and nanoscale under the influence of radiation.
Kata Kunci
thin-layer coatings
thin-film coatings
interaction of radiation with matter